Effect of electron energy distribution function on power deposition and plasma density in an inductively coupled discharge at very low pressures

Plasma Sources Science and Technology

Volumn 12, Issue 3, 2003, Pages 302-312

  Ramamurthi, Badri ^a   Economou, Demetre J ^a   Kaganovich, Igor D ^b  

^a University of Houston   (United States)

^b PRINCETON PLASMA PHYSICS LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC DISCHARGES; ELECTRODEPOSITION; KINETIC ENERGY; MAXWELL EQUATIONS; PLASMA DENSITY; PRESSURE EFFECTS;

ELECTRON ENERGY DISTRIBUTION FUNCTION; INDUCTIVELY COUPLED DISCHARGE; POWER DEPOSITION;

ELECTRON ENERGY LEVELS;

EID: 0041321028     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/12/3/302     Document Type: Article

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