A wafer-capped, high-lifetime ohmic MEMS RF switch

International Journal of RF and Microwave Computer-Aided Engineering

Volumn 14, Issue 4, 2004, Pages 338-344

  Lampen, James ^a   Majumder, Sumit ^a   Morrison, Richard ^a   Chaudhry, Aamer ^a   Maciel, John ^a  

^a Radant MEMS Incorporated   (United States)

Author keywords

Lifetime; MEMS; Ohmic; Switch

Indexed keywords

LIFETIME; OHMIC; SWITCH;

ANTENNAS; AUTOMATION; CANTILEVER BEAMS; ELECTRIC SWITCHES; ELECTROSTATICS; OPTIMIZATION;

MICROELECTROMECHANICAL DEVICES;

EID: 3042820538     PISSN: 10964290     EISSN: None     Source Type: Journal    
DOI: 10.1002/mmce.20020     Document Type: Article

References (6)

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5. M.L. Schirmer, P.M. Zavracky, E. McGruer, S. Majumder, R.H. Morrison, D. Potter, G.G. Adams, and J. Krim. Design, characterization and application of surface micromachined, electrostatically actuated microswitches, NARM Conf, Chicago II, 1998.
6. S. Majumder, J. Lampen, R. Morrison, and J. Maciel, An electrostatically actuated broadband MEMS switch, Proc Sensors Expo, Boston, MA, 2002.