Properties of Al-doped ZnO thin films deposited by a chemical spray process

Materials Characterization

Volumn 58, Issue 8-9 SPEC. ISS., 2007, Pages 708-714

  Gomez H ^a   Maldonado, A ^a   Castanedo Perez R ^a   Torres Delgado, G ^a   de la L Olvera, M ^a  

^a DEPARTAMENTO DE FÍSICA   (Mexico)

Author keywords

Chemical spray; Thin films; Zinc oxide

Indexed keywords

ALUMINUM; CRYSTALLINE MATERIALS; DOPING (ADDITIVES); GLASS; MORPHOLOGY; SPRAYING; THIN FILMS;

ALUMINUM DOPED ZINC OXIDE THIN FILMS; ANNEALING TREATMENT; CHEMICAL SPRAY; MORPHOLOGIC PROPERTIES;

ZINC OXIDE;

EID: 34250695048     PISSN: 10445803     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matchar.2006.11.012     Document Type: Article

References (25)

1. 2 optoelectronic devices. Thin Solid Films 476 (2005) 30-34
2. 2 gas sensor. Sens Actuators B Chem 107 (2005) 379-386
3. Szarko J.M., Song J.K., Blackledge C.W., Swart I., Leone S.R., Li S., et al. Optical injection probing of single ZnO tetrapod lasers. Chem Phys Lett 404 (2005) 171-176
4. 2 solar cells aspects of heterojunction formation. Thin Solid Films 387 (2001) 141-146
5. Ma J., Ji F., Zhang D., Ma H., and Li S. Optical and electronic properties of transparent conducting ZnO and ZnO:Al films prepared by evaporating method. Thin Solid Films 357 (1999) 98-101
6. Lamb D.A., and Irvine S.J.C. Growth properties of thin film ZnO deposited by MOCVD with n-butyl alcohol as the oxygen precursor. J Cryst Growth 273 (2004) 111-117
7. Natsume Y., and Sakata H. Zinc oxide films prepared by sol-gel spin-coating. Thin Solid Films 372 (2000) 30-36
8. Yu X., Ma J., Ji F., Wang Y., Zhang X., and Ma H. Influence of annealing on the properties of ZnO:Ga films prepared by radio frequency magnetron sputtering. Thin Solid Films 483 (2005) 296-300
9. Oh D.C., Setiawan A., Kim J.J., Ko H.J., Makino H., Hanada T., et al. Characterization of N-doped ZnO layers grown on (0 0 0 1) GaN/Al2O3 substrates by molecular beam epitaxy. Curr Appl Phys 4 (2004) 625-629
10. 2 by pulse laser deposition. J Cryst Growth 280 (2005) 185-190
11. Iwata K., Tampo H., Yamada A., Fons P., Matsubara K., Sakurai K., et al. Growth of ZnO and devices applications. Appl Surf Sci 244 (2005) 504-510
12. Ratheesh Kumar P.M., Sudha Kartha C., Vijayakumar K.P., Singh F., and Avasthi D.K. Effect of fluorine doping on structural, electrical and optical properties of ZnO thin films. Mater Sci Eng B Solid-State Mater Adv Technol 117 (2005) 307-312
13. Tokumoto M.S., Smith A., Santilli C.V., Pulcinelli S.H., Craievich A.F., Elkaim E., et al. Structural electrical and optical properties of undoped and indium doped ZnO thin films prepared by the pyrosol process at different temperatures. Thin Solid Films 416 (2002) 284-293
14. El Manouni A., Manjón F.J., Mollar M., Marí B., Gómez R., López M.C., et al. Effect of Al doping on ZnO thin films grown by spray pyrolysis. Superlattices Microstruct 39 (2006) 185-192
15. Martínez M.A., Herrero J., and Gutiérrez M.T. Deposition of transparent and conductive Al-doped ZnO thin films for photovoltaic solar cells. Sol Energy Mater Sol Cells 45 (1997) 75-86
16. Chopra K.L., Major S., and Pandya D.K. Transparent conductors-a status review. Thin Solid Film 102 (1983) 1-46
17. Altamirano-Juárez D.C., Torres-Delgado G., Jiménez-Sandoval S., Jiménez-Sandoval O., and Castanedo-Pérez R. Low-resistivity ZnO:F:Al transparent thin films. Sol Energy Mater Sol Cells 82 (2004) 35-43
18. Nunes P., Fortunato E., and Tonello P. Effect of different elements on the properties of ZnO thin films. Vacuum 65 (2002) 281-285
19. Sieber I., Wandeka N., Urban I., Dorfel I., Schierhorn E., Fenske F., et al. Electron microscopic characterization of reactively sputtered ZnO films with different Al-doping levels. Thin Solid Films 330 (1998) 108-113
20. Islam M.N., Ghosh T.B., Chopra K.L., and Acharya H.N. XPS and X-ray diffraction studies of aluminum-doped zinc oxide transparent conducting films. Thin Solid Films 280 (1996) 20-25
21. Tang W., and Cameron D.C. Aluminum-doped zinc oxide transparent conductors deposited by the sol-gel process. Thin Solid Films 238 (1994) 83-87
22. Roth A.P., and Webb J.B. Band-gap narrowing in heavily defect-doped ZnO. Phys Rev B 25 (1982) 7836-7839
23. Flory F.R. Thin films for optical systems (1995), Marcel Dekker, Inc 285-287
24. Paraguay D.F., Morales J., Estrada L.W., Andrade E., and Miki-Yoshida M. Influence of Al, In, Cu, Fe and Sn dopants in the microstructure of zinc oxide thin films obtained by spray pyrolysis. Thin Solid films 366 (2000) 16-17
25. Cullity B. Elements of X-ray diffraction. 2nd ed (1978), Addison-Wesley 102