Self-filling low-cost membrane micropump

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1998, Pages 432-437

  Kaemper, K P ^a   Doepper, J ^a   Ehrfeld, W ^a   Oberbeck, S ^a  

^a INSTITUT FÜR MIKROTECHNIK MAINZ GMBH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COST EFFECTIVENESS; FLOW OF FLUIDS; INJECTION MOLDING; LASER APPLICATIONS; MEMBRANES;

MEMBRANE MICROPUMPS;

VACUUM PUMPS;

EID: 0031703290     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)