Thin, crystalline MgO on hexagonal 6H-SiC (0001) by molecular beam epitaxy for functional oxide integration

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 25, Issue 3, 2007, Pages 1033-1038

  Goodrich, T L ^a   Cai, Z ^a   Losego, M D ^b   Maria, J P ^b   Ziemer, K S ^a  

^a Northeastern University   (United States)

^b North Carolina State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLINE MATERIALS; ENERGY GAP; MAGNESIUM COMPOUNDS; MOLECULAR BEAM EPITAXY; THIN FILMS; X RAY DIFFRACTION;

FUNCTIONAL OXIDE INTEGRATION; MULTIFUNCTIONAL DEVICES; OXYGEN PLASMA SOURCE; SUBSTRATE TEMPERATURE;

SILICON CARBIDE;

EID: 34249904373     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2734979     Document Type: Article

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