Microelectromechanical systems and microsensors

Defence Science Journal

Volumn 57, Issue 3, 2007, Pages 209-224

  Kal, Santiram ^a  

^a Indian Institute of Technology   (India)

Author keywords

Actuators; Aerospace applications; Microelectric material; Microelectromechanical systems; Micromachining; Microsensors; Microstructures; Sensors; Single crystal silicons

Indexed keywords

ACCELEROMETERS; ACTUATORS; AEROSPACE APPLICATIONS; MICROELECTRONICS; MICROMACHINING; MICROSENSORS; VLSI CIRCUITS;

MEMS GYRO; MICRO THRUSTERS; PIEZOELECTRIC CRYSTALS; SINGLE CRYSTAL SILICONS;

MEMS;

EID: 34249340812     PISSN: 0011748X     EISSN: None     Source Type: Journal    
DOI: 10.14429/dsj.57.1762     Document Type: Review

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