The effect of substrate material and postannealing on the photoluminescence and piezo properties of DC-sputtered ZnO

Journal of Electronic Materials

Volumn 36, Issue 4, 2007, Pages 507-518

  Schuler, Leo P ^a   Valanoor, Nagarajan ^b   Miller, Paul ^a   Guy, Ian ^c   Reeves, Roger J ^a   Alkaisi, Maan M ^a  

^a UNIVERSITY OF CANTERBURY   (New Zealand)

^b UNIVERSITY OF NEW SOUTH WALES   (Australia)

^c MACQUARIE UNIVERSITY   (Australia)

Author keywords

Annealing; DC magnetron sputtering; Fused silica glass; Multiple substrate; Photoluminescence (PL); Piezoresponse force microscopy (PFM); Sapphire; Silicon

Indexed keywords

INVERSION DOMAINS; MULTIPLE SUBSTRATES; PIEZORESPONSE FORCE MICROSCOPY (PFM);

ANNEALING; FUSED SILICA; PHOTOLUMINESCENCE; PIEZOELECTRICITY; SAPPHIRE; SILICON; SPUTTER DEPOSITION; X RAY DIFFRACTION; ZINC OXIDE;

THIN FILMS;

EID: 34249094920     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-006-0046-8     Document Type: Conference Paper

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