The properties of reactively sputtered, stoichiometry-controlled and optimum-conductivity transparent zinc/aluminium oxide films as a function of their aluminium content

Surface and Coatings Technology

Volumn 99, Issue 1-2, 1998, Pages 33-41

  Safi, I ^a   Danson, N ^a   Howson, R P ^a  

^a LOUGHBOROUGH UNIVERSITY   (United Kingdom)

Author keywords

Al oxide; Reactive sputtering; Transparent conducting oxides; Zn oxide

Indexed keywords

EID: 0005174228     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(97)00126-6     Document Type: Article

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