Fabrication of densely arrayed Si needles with large height for transdermal drug delivery system application

IEEJ Transactions on Electrical and Electronic Engineering

Volumn 2, Issue 3, 2007, Pages 340-347

  Sasaki, Hikaru ^a   Shikida, Mitsuhiro ^a   Sato, Kazuo ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

Anisotropic wet etching; Microneedle

Indexed keywords

DRUG DELIVERY; ETCHING; NEEDLES;

ANISOTROPIC WET ETCHING; MICRONEEDLES;

SILICON;

EID: 34248230250     PISSN: 19314973     EISSN: 19314981     Source Type: Journal    
DOI: 10.1002/tee.20148     Document Type: Article

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