Side-opened out-of-plane microneedles for microfluidic transdermal liquid transfer

Journal of Microelectromechanical Systems

Volumn 12, Issue 3, 2003, Pages 296-301

  Griss, Patrick ^a   Stemme, Göran ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

Deep reactive ion etching (DRIE); Delivery; Drug; Microneedle; Transdermal; Vaccine

Indexed keywords

PHOTOLITHOGRAPHY; SHAFTS (MACHINE COMPONENTS); TISSUE; VACCINES;

DEEP-REACTIVE ION ETCHING;

SILICON WAFERS;

EID: 0037871729     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2003.809959     Document Type: Article

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