Diamond nanocrystals and amorphous SiOx nanowires formed by rapid thermal annealing of carbon film

Thin Solid Films

Volumn 515, Issue 17, 2007, Pages 6707-6712

  Liang, Xingbo ^a   Wang, Lei ^a   Li, Xiaoqiang ^a   Yang, Deren ^a  

^a ZHEJIANG UNIVERSITY   (China)

Author keywords

Annealing; Carbon; Diamond; Silicon oxide

Indexed keywords

AMORPHOUS SILICON; DIAMONDS; HIGH TEMPERATURE EFFECTS; NANOCRYSTALLITES; NANOCRYSTALS; NANOWIRES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RAPID THERMAL ANNEALING;

INTERLAYERS; REACTION PRODUCTS;

CARBON FILMS;

EID: 34247563371     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.01.044     Document Type: Article

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