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Volumn 60, Issue 6, 2006, Pages 730-733
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The structural evolution of nanocrystalline diamond films synthesized by r.f. PECVD
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Author keywords
Diamond film; Low temperature; Nanostructure; PECVD
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Indexed keywords
CARBON DIOXIDE;
COLUMNS (STRUCTURAL);
DIAMOND FILMS;
NUCLEATION;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
STRUCTURAL ANALYSIS;
GRAINY STRUCTURES;
LOW TEMPERATURES;
NANOSTRUCTURES;
PECVD;
NANOSTRUCTURED MATERIALS;
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EID: 29144463719
PISSN: 0167577X
EISSN: None
Source Type: Journal
DOI: 10.1016/j.matlet.2005.10.001 Document Type: Article |
Times cited : (7)
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References (17)
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