Heat treatment of thin carbon films and the effect on residual stress, modulus, thermal expansion and microstructure

Carbon

Volumn 41, Issue 10, 2003, Pages 1867-1875

  Taylor, Craig A ^a   Wayne, Mark F ^a   Chiu, Wilson K S ^a  

^a UNIVERSITY OF CONNECTICUT   (United States)

Author keywords

A. Pyrolytic carbon; B. Heat treatment; C. Raman spectroscopy; D. Elastic properties

Indexed keywords

ADHESION; CHEMICAL VAPOR DEPOSITION; INDENTATION; NONDESTRUCTIVE EXAMINATION; PYROLYSIS; RAMAN SPECTROSCOPY; RESIDUAL STRESSES; TENSILE STRENGTH; THIN FILMS;

CARBON FILMS;

GRAPHITE FIBERS;

EID: 0038487845     PISSN: 00086223     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0008-6223(03)00181-7     Document Type: Article

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