Micro object handling under SEM by vision-based automatic control

Proceedings - IEEE International Conference on Robotics and Automation

Volumn 3, Issue , 1999, Pages 2189-2196

  Kasaya, Takeshi ^a   Miyazaki, Hideki ^a   Saito, Shigeki ^a   Sato, Tomomasa ^a  

^a Tokyo City Universtiy   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; COMPUTER VISION; CONTACT SENSORS; END EFFECTORS; IMAGE PROCESSING; MANIPULATORS; MATERIALS HANDLING EQUIPMENT; SCANNING ELECTRON MICROSCOPY;

INTELLIGENT SENSOR BASED CONTROL; MICRO OBJECT HANDLING;

INTELLIGENT CONTROL;

EID: 0032668554     PISSN: 10504729     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (9)