-
1
-
-
0032306958
-
-
Schütze A, Jeong J Y, Babayan S E, Park J, Selwyn G S and Hicks R F 1998 IEEE. Trans. Plasma Sci. 26 1685-94
-
(1998)
IEEE. Trans. Plasma Sci.
, vol.26
, Issue.6
, pp. 1685-1694
-
-
Schütze, A.1
Jeong, J.Y.2
Babayan, S.E.3
Park, J.4
Selwyn, G.S.5
Hicks, R.F.6
-
2
-
-
0001083968
-
-
Park J, Henins I, Herrmann H W, Selwyn G S and Hicks R F 2001 J. Appl. Phys. 89 20-28
-
(2001)
J. Appl. Phys.
, vol.89
, Issue.1
, pp. 20-28
-
-
Park, J.1
Henins, I.2
Herrmann, H.W.3
Selwyn, G.S.4
Hicks, R.F.5
-
4
-
-
0032138693
-
-
Jeong J Y, Babayan S E, Tu V J, Park J, Henins I, Hicks R F and Selwyn G S 1998 Plasma Sources Sci. Technol. 7 282-5
-
(1998)
Plasma Sources Sci. Technol.
, vol.7
, Issue.3
, pp. 282-285
-
-
Jeong, J.Y.1
Babayan, S.E.2
Tu, V.J.3
Park, J.4
Henins, I.5
Hicks, R.F.6
Selwyn, G.S.7
-
5
-
-
0033466460
-
-
Jeong J Y, Babayan S E, Schütze A, Tu V J, Park J, Henins I, Selwyn G S and Hicks R F 1999 J. Vac. Sci. Technol. A 17 2581-5
-
(1999)
J. Vac. Sci. Technol.
, vol.17
, Issue.5
, pp. 2581-2585
-
-
Jeong, J.Y.1
Babayan, S.E.2
Schütze, A.3
Tu, V.J.4
Park, J.5
Henins, I.6
Selwyn, G.S.7
Hicks, R.F.8
-
6
-
-
0035505462
-
-
Babayan S E, Jeong J Y, Schütze A, Tu V J, Moravej M, Selwyn G S and Hicks R F 2001 Plasma Sources Sci. Technol. 10 573-8
-
(2001)
Plasma Sources Sci. Technol.
, vol.10
, Issue.4
, pp. 573-578
-
-
Babayan, S.E.1
Jeong, J.Y.2
Schütze, A.3
Tu, V.J.4
Moravej, M.5
Selwyn, G.S.6
Hicks, R.F.7
-
8
-
-
0032140139
-
-
Babayan S E, Jeong J Y, Tu V J, Park J, Selwyn G S and Hicks R F 1998 Plasma Sources Sci. Technol. 7 286-8
-
(1998)
Plasma Sources Sci. Technol.
, vol.7
, Issue.3
, pp. 286-288
-
-
Babayan, S.E.1
Jeong, J.Y.2
Tu, V.J.3
Park, J.4
Selwyn, G.S.5
Hicks, R.F.6
-
15
-
-
0034315703
-
-
Tu V J, Jeong J Y, Schütze A, Babayan S E, Ding G, Selwyn G S and Hicks R F 2000 J. Vac. Sci. Technol. A 18 2799-805
-
(2000)
J. Vac. Sci. Technol.
, vol.18
, Issue.6
, pp. 2799-2805
-
-
Tu, V.J.1
Jeong, J.Y.2
Schütze, A.3
Babayan, S.E.4
Ding, G.5
Selwyn, G.S.6
Hicks, R.F.7
-
17
-
-
0038044527
-
-
Toshifuji J, Katsumata T, Takikawa H, Sakakibara T and Shimizu I 2003 Surf. Coat. Technol. 171 302-6
-
(2003)
Surf. Coat. Technol.
, vol.171
, Issue.1-3
, pp. 302-306
-
-
Toshifuji, J.1
Katsumata, T.2
Takikawa, H.3
Sakakibara, T.4
Shimizu, I.5
-
20
-
-
21044438162
-
-
Miclea M, Kunze K, Heitmann U, Florek S, Franzke J and Niemax K 2005 J. Phys. D: Appl. Phys. 38 1709-15
-
(2005)
J. Phys. D: Appl. Phys.
, vol.38
, Issue.11
, pp. 1709-1715
-
-
Miclea, M.1
Kunze, K.2
Heitmann, U.3
Florek, S.4
Franzke, J.5
Niemax, K.6
-
22
-
-
0000904120
-
-
Park J, Henins I, Herrmann H W, Selwyn G S, Jeong J Y, Hicks R F, Shim D and Chang C S 2000 Appl. Phys. Lett. 76 288-90
-
(2000)
Appl. Phys. Lett.
, vol.76
, Issue.3
, pp. 288-290
-
-
Park, J.1
Henins, I.2
Herrmann, H.W.3
Selwyn, G.S.4
Jeong, J.Y.5
Hicks, R.F.6
Shim, D.7
Chang, C.S.8
-
24
-
-
22544450235
-
-
Laimer J, Haslinger S, Meissl W, Hell J and Störi H 2005 Vacuum 79 209-14
-
(2005)
Vacuum
, vol.79
, Issue.3-4
, pp. 209-214
-
-
Laimer, J.1
Haslinger, S.2
Meissl, W.3
Hell, J.4
Störi, H.5
-
25
-
-
34247478486
-
-
Laimer J, Haslinger S, Meissl W, Hell J and Störi H 2005 Proc. 17th Int. Symp. on Plasma Chemistry (Toronto, Canada, 7-12 August, 2005) ed J Mostaghimi et al
-
(2005)
Proc. 17th Int. Symp. on Plasma Chemistry
-
-
Laimer, J.1
Haslinger, S.2
Meissl, W.3
Hell, J.4
Störi, H.5
-
26
-
-
18844417421
-
-
Vleugels M, Shama G, Deng X T, Greenacre E, Brocklehurst T and Kong M G 2005 IEEE. Trans. Plasma Sci. 33 824-8
-
(2005)
IEEE. Trans. Plasma Sci.
, vol.33
, Issue.2
, pp. 824-828
-
-
Vleugels, M.1
Shama, G.2
Deng, X.T.3
Greenacre, E.4
Brocklehurst, T.5
Kong, M.G.6
-
28
-
-
18744376333
-
-
Yang X, Moravej M, Nowling G R, Babayan S E, Panelon J, Chang J P and Hicks R F 2005 Plasma Sources Sci. Technol. 14 314-20
-
(2005)
Plasma Sources Sci. Technol.
, vol.14
, Issue.2
, pp. 314-320
-
-
Yang, X.1
Moravej, M.2
Nowling, G.R.3
Babayan, S.E.4
Panelon, J.5
Chang, J.P.6
Hicks, R.F.7
-
29
-
-
0345377694
-
-
Shi J J, Deng X T, Hall R, Punnett J D and Kong M G 2003 J. Appl. Phys. 94 6303-10
-
(2003)
J. Appl. Phys.
, vol.94
, Issue.10
, pp. 6303-6310
-
-
Shi, J.J.1
Deng, X.T.2
Hall, R.3
Punnett, J.D.4
Kong, M.G.5
-
32
-
-
0347769631
-
-
tefeéka M, Korzec D, ir M, Imahori Y and Kando M 2001 Sci. Technol. Adv. Mater. 2 587-93
-
(2001)
Sci. Technol. Adv. Mater.
, vol.2
, Issue.3-4
, pp. 587-593
-
-
Tefeéka, M.1
Korzec, D.2
Ir, M.3
Imahori, Y.4
Kando, M.5
-
33
-
-
0034247479
-
-
Gherardi N, Gouda G, Gat E, Ricard A and Massines F 2000 Plasma Sources Sci. Technol. 9 340-6
-
(2000)
Plasma Sources Sci. Technol.
, vol.9
, Issue.3
, pp. 340-346
-
-
Gherardi, N.1
Gouda, G.2
Gat, E.3
Ricard, A.4
Massines, F.5
-
35
-
-
30044446199
-
-
Dong L-F, Li S-F, Liu F-C, Liu F and Liu S-H 2005 Trans. Beijing Inst. Technol. 25 8-10 (in Chinese)
-
(2005)
Trans. Beijing Inst. Technol.
, vol.25
, pp. 8-10
-
-
Dong, L.-F.1
Li, S.-F.2
Liu, F.-C.3
Liu, F.4
Liu, S.-H.5
-
36
-
-
34247503676
-
-
Li D-J 2004 Production mechanisms of atmospheric pressure plasma jets Master Thesis Dalian University of Technology (in Chinese)
-
(2004)
Master Thesis
-
-
Li, D.-J.1
-
37
-
-
4444338522
-
-
Rahman A, Yalin A P, Surla V, Stan O, Hoshimiya K, Yu Z, Littlefield E and Collins G J 2004 Plasma Sources Sci. Technol. 13 537-47
-
(2004)
Plasma Sources Sci. Technol.
, vol.13
, Issue.3
, pp. 537-547
-
-
Rahman, A.1
Yalin, A.P.2
Surla, V.3
Stan, O.4
Hoshimiya, K.5
Yu, Z.6
Littlefield, E.7
Collins, G.J.8
|