α, γ, and normal, abnormal glow discharge modes in radio-frequency capacitively coupled discharges at atmospheric pressure

Physics of Plasmas

Volumn 13, Issue 3, 2006, Pages

  Moon, Se Youn ^a   Rhee, J K ^a   Kim, D B ^a   Choe, W ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ATMOSPHERIC PRESSURE; CAPACITANCE; CAPACITORS; ELECTRIC BREAKDOWN; ELECTRODES; VOLTAGE CONTROL;

CAPACITOR CIRCUIT MODEL; GLOW REGIMES; PASCHEN CURVE; SHEATH BREAKDOWN;

GLOW DISCHARGES;

EID: 33645670570     PISSN: 1070664X     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2177590     Document Type: Article

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