Controlling the number of excited atoms flowing into the reaction chamber using pulse-modulated induction thermal plasmas at atmospheric pressure

Plasma Sources Science and Technology

Volumn 16, Issue 2, 2007, Pages 281-289

  Tanaka, Yasunori ^a   Uesugi, Y ^a   Sakuta, T ^a  

^a KANAZAWA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; ATMOSPHERIC PRESSURE; ELECTRIC COILS; ELECTRIC EXCITERS; MOSFET DEVICES;

COIL CURRENT; PULSE MODULATED INDUCTION THERMAL PLASMA (PMITP);

PLASMA HEATING;

EID: 34247479617     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/16/2/010     Document Type: Article

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