Temperature control of Ar induction thermal plasma with diatomic molecular gases by pulse amplitude modulation of the coil current

Plasma Sources Science and Technology

Volumn 12, Issue 1, 2003, Pages 69-77

  Tanaka, Yasunori ^a   Sakuta, Tadahiro ^a  

^a KANAZAWA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; ATMOSPHERIC PRESSURE; ELECTRIC COILS; ELECTRIC CURRENTS; MOLECULAR PHYSICS; MOSFET DEVICES; PULSE AMPLITUDE MODULATION; TEMPERATURE CONTROL; TEMPERATURE MEASUREMENT;

COIL CURRENT; DIATOMIC MOLECULAR GASES; SHIMMER CURRENT LEVEL; THERMAL PLASMA;

INDUCTIVELY COUPLED PLASMA;

EID: 0037292706     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/12/1/309     Document Type: Article

References (28)

1. Morvan D, Carzard-Juvernat I and Amouroux J 1998 Photovoltaic silicon produced by thermal plasma: influence of atomic hydrogen on oxygen elimination and passivation of the crystal defects J. Mater. Res. 13 2709-20
2. 2 and He Proc. 13th European Photovoltaic Solar Energy Conf. pp 2451-54
3. Hamatani H, Kumaoka H, Yahata T and Yoshida T 1991 An integrated fabrication process for solid oxide fuel cells using hybrid plasma spraying J. Japan Inst. Metals 55 1240-8 (in Japanese)
4. Takeuchi S, Takeda K, Uematsu N, Komaki H, Mizuno K and Yoshida T 1995 The first step to industrialize decomposition process of ozone depleting substances by steam plasma Proc. 12th Int. Symp. on Plasma Chemistry pp 1021-6
5. Soucy G, Jurewicz J W and Boulos M I 1994 Mixing study of the induction plasma reactor: Part I. Axial injection mode Plasma Chem. Plasma Process. 14 43-58
6. Soucy G, Jurewicz J W and Boulos M I 1994 Mixing study of the induction plasma reactor: Part II. Radial injection mode Plasma Chem. Plasma Process. 14 59-71
7. Girshick S L, Li, C, Yu B W and Han H 1993 Fluid boundary layer effects in atmospheric-pressure plasma diamond film deposition Plasma Chem. Plasma Process. 13 169-87
8. Tuszewski M 1998 Particle and heat transport in a low-frequency inductively coupled plasma Phys. Plasmas 5 1198-205
9. Proulx P, Mostaghimi J and Boulos M I 1987 Heating of powders in an r.f. inductively coupled plasma under dense loading conditions Plasma Chem. Plasma Process. 7 29-52
10. Uesugi T, Nakamura O, Yoshida T and Akashi K 1988 A tandem radio-frequency plasma torch J. Appl. Phys. 64 3874-9
11. McKelliget J W and El-Kaddah N 1988 The effect of coil design on materials synthesis in an inductively coupled plasma torch J. Appl. Phys. 64 2948-54
12. Mostaghini J and Boulos M I 1989 Two-dimensional electromagnetic field effects in induction plasma modelling Plasma Chem. Plasma Process. 9 25-44
13. Chen X and Pfender E 1991 Modeling of rf plasma torch with a metallic tube inserted for reactant injection Plasma Chem. Plasma Process. 11 103-28
14. Chen K and Boulos M I 1994 Turbulence in induction plasma modelling J. Phys. D: Appl. Phys. 27 946-52
15. Sakuta T 1996 Dynamic behavior and stability of induction thermal plasma Proc. 3rd Asia-Pacific Conf. on Plasma Science and Technology vol 2, pp 385-90
16. Sakuta T, Oguri S, Takashima T and Boulos M I 1993 Effects of plasma diameter and operating frequency on dynamic behavior of induction thermal plasma Plasma Sources Sci. Technol. 2 67-71
17. Ishigaki T, Xiaobao F, Sakuta T, Banjo T and Shibuya Y 1997 Generation of pulse-modulated induction thermal plasma at atmospheric pressure Appl. Phys. Lett. 71 3787-9
18. Sakuta T, Paul K C, Katsuki K and Ishigaki T 1999 Experimentally diagnosed transient behavior of pulse modulated inductively coupled thermal plasma J. Appl. Phys. 85 1372-7
19. Hossain M M, Paul K C, Tanaka Y, Sakuta T and Ishigaki T 2000 Prediction of operating region of pulse-modulated radio frequency inductively coupled thermal plasma J. Phys. D: Appl. Phys. 33 1843-53
20. Ishigaki T and Sakuta T 1999 Pulse-modulated rf thermal plasma for advanced materials processing J. Intell. Mater. System. Struct. 10 565-8
21. Paul K C, Mostaghimi J, Ishigaki T and Sakuta T 2001 Transient response of radio frequency inductively coupled plasma for pulse modulation Plasma Chem. Plasma Process. 21 371-400
22. Sakakibara Y, Katagiri G, Toraguchi M and Sakuta T 1998 Generation of large area inductively coupled plasma at atmospheric pressure with high efficiency Proc. 4th Asia-Pacific Conf. on Plasma Science and Technology p 103
23. Wiese W L, Smith M W and Miles B M 1969 Atomic transition probabilities Sodium Through Calcium vol II (Washington DC: NBS)
24. Moore C E 1971 Atomic Energy Levels vol I (Washington DC: NBS)
25. Huber K P and Herzberg G 1979 Molecular Spectra and Molecular Structure IV. Constants of Diatomic Molecules (New York: Van Nostrand Reinhold)
26. Boulos M I, Fauchais P and Pfender E 1995 Thermal Plasmas Fundamentals and Applications vol I, A.3 Plasma Tables, p 341
27. Boulos M I, Fauchais P and Pfender E 1995 Thermal Plasmas Fundamentals and Applications vol I, A.3 Plasma Tables, pp 388-412
28. Cabannes F and Chapelle J 1971 Reactions Under Plasma Conditions vol 1, ch 7, ed M Venugopalan (New York: Wiley-Interscience)