Stable operation region and dynamic behavior of Ar pulse-modulated induction thermal plasma with different molecular gases

Electrical Engineering in Japan (English translation of Denki Gakkai Ronbunshi)

Volumn 143, Issue 4, 2003, Pages 1-11

  Tanaka, Yasunori ^a   Sakuta, Tadahiro ^a  

^a KANAZAWA UNIVERSITY   (Japan)

Author keywords

Argon excitation temperature; Dynamic response time; Induction thermal plasma; Pulse modulation

Indexed keywords

ARGON; CARBON DIOXIDE; ELECTRIC COILS; ELECTRIC WAVEFORMS; ELECTROMAGNETIC FIELDS; ELECTRONS; INDUCTIVELY COUPLED PLASMA; KINETIC ENERGY; MOSFET DEVICES; THERMAL EFFECTS;

ARGON EXCITATION TEMPERATURE; INDUCTION THERMAL PLASMA; MOLECULAR GAS; THERMAL PLASMA; TIME-VARYING RADIATION;

PLASMA THEORY;

EID: 0038528407     PISSN: 04247760     EISSN: None     Source Type: Journal    
DOI: 10.1002/eej.10144     Document Type: Article

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