Thermal-optic switch by total internal reflection of micromachined silicon prism

IEEE Journal on Selected Topics in Quantum Electronics

Volumn 13, Issue 2, 2007, Pages 348-358

  Zhong, T ^b   Zhang, X M ^a,b   Liu, A Q ^a,b   Li, J ^c   Lu, C ^a,d   Tang, D Y ^b  

^a IEEE   (Singapore)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^c INSTITUTE OF MICROELECTRONICS   (Singapore)

^d HONG KONG POLYTECHNIC UNIVERSITY   (Hong Kong)

Author keywords

Microelectromechanical systems (MEMS); Optical switch; Thermo optic effect (TOE); Total internal reflection (TIR)

Indexed keywords

LOW POWER SWITCHING; THERMO OPTIC EFFECT (TOE); TOTAL INTERNAL REFLECTION (TIR); TRANSMISSION STATE;

MEMS; MICROMACHINING; PRISMS; REFLECTION; SILICON; SILICON ON INSULATOR TECHNOLOGY;

OPTICAL SWITCHES;

EID: 34247476449     PISSN: 1077260X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSTQE.2007.893111     Document Type: Article

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