Characterization of silicon scanning mirror for laser display

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 41, Issue 9, 2002, Pages 5853-5857

  Lee, Jin Ho ^a,b   Ko, Young Chul ^a   Choi, Byoung So ^a   Kim, Jong Min ^a   Jeon, Duk Young ^a  

^a Samsung Advanced Institute of Technology (SAIT)   (South Korea)

^b Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

Laser display; Linear actuation laser doppler vibrometer (LDV); Scanning mirror; Vertical comb

Indexed keywords

ACTUATORS; DOPPLER EFFECT; ELECTRIC POTENTIAL; LASER APPLICATIONS; MIRRORS; SCANNING;

LASER DOPPLER VIBROMETERS (LDV);

DISPLAY DEVICES;

EID: 0036757805     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.41.5853     Document Type: Article

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