Chemical modifications of Pb(Zr0.3,Ti0.7)O 3 precursor solutions and their influence on the morphological and electrical properties of the resulting thin films

Journal of Sol-Gel Science and Technology

Volumn 42, Issue 3, 2007, Pages 337-352

  Schneller, Theodor ^a   Waser, Rainer ^a,b  

^a RWTH AACHEN UNIVERSITY   (Germany)

^b FORSCHUNGSZENTRUM JÜLICH   (Germany)

Author keywords

Chemical solution deposition; Electronic oxide films; Ferroelectric; Hysterisis; Microstructure; PZT; SEM; Thin films; XRD

Indexed keywords

DEPOSITION; LEAD COMPOUNDS; PYROLYSIS; REACTION KINETICS; SILICON WAFERS; TRANSITION METALS;

ALKOXIDES; AMBIENT HUMIDITY; CARBOXYLATES; CHEMICAL SOLUTION DEPOSITION (CSD); ELECTRONIC OXIDE FILMS;

THIN FILMS;

EID: 34247363623     PISSN: 09280707     EISSN: None     Source Type: Journal    
DOI: 10.1007/s10971-007-0764-2     Document Type: Article

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