Evidence of stress-induced tetragonal-to-monoclinic phase transformation during sputter deposition of yttria-stabilized zirconia

Journal of Materials Research

Volumn 22, Issue 4, 2007, Pages 1105-1111

  Piascik, Jeffrey R ^a,b   Zhang, Qi ^a   Bower, Christopher A ^b   Thompson, Jeffrey Y ^a,c   Stoner, Brian R ^a,b  

^a UNIVERSITY OF NORTH CAROLINA   (United States)

^b RTI INTERNATIONAL   (United States)

^c The University of Texas at San Antonio   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHARACTERIZATION; MAGNETRON SPUTTERING; MARTENSITIC TRANSFORMATIONS; PHASE TRANSITIONS; SCANNING ELECTRON MICROSCOPY; SPUTTER DEPOSITION; STRESSES; THERMODYNAMIC STABILITY; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

FILM STRESS; RADIO-FREQUENCY MAGNETRON SPUTTERING; TETRAGONAL-TO-MONOCLINIC PHASE TRANSFORMATION;

YTTRIA STABILIZED ZIRCONIA;

EID: 34247360336     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/jmr.2007.0128     Document Type: Article

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