Thin-film yttria-stabilized tetragonal zirconia

Solid State Ionics

Volumn 92, Issue 1-2, 1996, Pages 85-89

  Liaw, Bor Yann ^a   Rocheleau, Richard E ^a   Gao, Qing Hua ^a  

^a UNIVERSITY OF HAWAII   (United States)

Author keywords

Sputtering; Tetragonal zirconia polycrystals; Thin films; Yttria stabilized zirconia

Indexed keywords

ANNEALING; CRYSTAL ORIENTATION; PHASE COMPOSITION; POLYCRYSTALS; SPUTTER DEPOSITION; THERMAL EFFECTS; THIN FILMS; YTTRIUM COMPOUNDS;

RADIO FREQUENCY SPUTTERING; TETRAGONAL ZIRCONIA POLYCRYSTALS; YTTRIA STABILIZED ZIRCONIA;

ZIRCONIA;

EID: 0030291050     PISSN: 01672738     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0167-2738(96)00470-5     Document Type: Article

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