Structure of ZrO2 optical thin films prepared by dual ion beam reactive sputter deposition

Surface and Coatings Technology

Volumn 84, Issue 1-3, 1996, Pages 470-475

  Riviere J P ^a   Harel, S ^a   Guerin, P ^a   Straboni, A ^a  

^a UNIVERSITÉ DE POITIERS   (France)

Author keywords

Ellipsometry; Ion beam; Optical coatings; Refractive index; Zirconia

Indexed keywords

COMPOSITION; CRYSTAL MICROSTRUCTURE; DENSITY (SPECIFIC GRAVITY); ELLIPSOMETRY; FILM GROWTH; ION BOMBARDMENT; OPTICAL VARIABLES MEASUREMENT; REFRACTIVE INDEX; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SPUTTER DEPOSITION; TRANSMISSION ELECTRON MICROSCOPY; ZIRCONIA;

DUAL ION BEAM REACTIVE SPUTTER DEPOSITION; HOMOGENEITY; X RAY REFLECTOMETRY;

OPTICAL COATINGS;

EID: 0030270117     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(95)02754-8     Document Type: Article

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