SEM/FIB stage calibration with photogrammetric methods

International Archives of the Photogrammetry, Remote Sensing and Spatial Information Sciences - ISPRS Archives

Volumn 36, Issue , 2006, Pages

  Ritter, M ^a   Hemmleb, M ^b   Faber, P ^c   Lich, B ^c   Hohenberg, H ^d  

^a BAM FEDERAL INSTITUTE FOR MATERIALS RESEARCH AND TESTING   (Germany)

^b FEI Company ^*  (Germany)

^c Thermo Fisher Scientific   (United States)

^d UNIVERSITY OF HAMBURG   (Germany)

Author keywords

Accuracy; Adjustment; Bundle; Calibration; Metrology; Microscopy

Indexed keywords

CALIBRATION; ELECTRONS; FOCUSED ION BEAMS; IONS; MEASUREMENT; MICROSCOPIC EXAMINATION; PHOTOGRAMMETRY; SCANNING ELECTRON MICROSCOPY; UNCERTAINTY ANALYSIS;

ACCURACY; ADJUSTMENT; BUNDLE; GEOMETRICAL CALIBRATIONS; INDISPENSABLE TOOLS; MEASUREMENT UNCERTAINTY; METROLOGICAL ANALYSIS; PHOTOGRAMMETRIC CALIBRATION;

MICROMACHINING;

EID: 84976559314     PISSN: 16821750     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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