Atomic force probe for sidewall scanning of nano- and microstructures

Applied Physics Letters

Volumn 88, Issue 17, 2006, Pages

  Dai, Gaoliang ^a   Wolff, Helmut ^a   Pohlenz, Frank ^a   Danzebrink, Hans Ulrich ^a   Wilkening, Günter ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; BENDING (DEFORMATION); CANTILEVER BEAMS; DEFORMATION; MEASUREMENT THEORY; NANOSTRUCTURED MATERIALS; SCANNING; SURFACE ROUGHNESS; TORSIONAL STRESS;

ATOMIC FORCE PROBES; MICROTRENCHES; SIDEWALL SCANNING; VERTICAL CANTILEVERS;

MICROSTRUCTURE;

EID: 33646400332     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2198516     Document Type: Article

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