A fast-response microfluidic gas concentrating device for environmental sensing

Sensors and Actuators, A: Physical

Volumn 136, Issue 1, 2007, Pages 69-79

  Li, Sheng ^a   Day, Jonathan C ^a   Park, Jung J ^a   Cadou, Christopher P ^a   Ghodssi, Reza ^a  

^a UNIVERSITY OF MARYLAND   (United States)

Author keywords

Computational fluid dynamics; Gas concentration; MEMS; Microfluidic device

Indexed keywords

CHEMICAL SENSORS; COMPUTATIONAL FLUID DYNAMICS; COMPUTER SIMULATION; GAS MIXTURES; MOLECULAR WEIGHT; PERMEATION; PHOTOLITHOGRAPHY; REACTIVE ION ETCHING;

ANODIC BONDING; DEEP REACTIVE ION ETCHING (DRIE); GAS CONCENTRATION; MICROFLUIDIC DEVICES;

MICROFLUIDICS;

EID: 34247101712     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.11.035     Document Type: Article

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