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Volumn 22, Issue 4, 2007, Pages 348-353

An electron mobility model for ultra-thin gate-oxide MOSFETs including the contribution of remote scattering mechanisms

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; COULOMB BLOCKADE; ELECTRON MOBILITY; MONTE CARLO METHODS; POLYSILICON;

EID: 34047242246     PISSN: 02681242     EISSN: 13616641     Source Type: Journal    
DOI: 10.1088/0268-1242/22/4/009     Document Type: Article
Times cited : (7)

References (17)
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    • Effect of polysilicon depletion charge on electron mobility in ultrathin oxide MOSFETs
    • Gmiz F, Godoy A, Roldn J B, Carceller J E and Cartujo P 2003 Effect of polysilicon depletion charge on electron mobility in ultrathin oxide MOSFETs Semicond. Sci. Technol. 18 927-37
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    • Gmiz, F.1    Godoy, A.2    Roldn, J.B.3    Carceller, J.E.4    Cartujo, P.5
  • 3
    • 32444447598 scopus 로고    scopus 로고
    • Experimental evidence of inversion-layer mobility lowering in ultrathin gate oxide metal-oxide-semiconductor field-effect-transistors with direct tunneling current
    • Takagi S and Takayanagi M 2002 Experimental evidence of inversion-layer mobility lowering in ultrathin gate oxide metal-oxide-semiconductor field-effect-transistors with direct tunneling current Japan. J. Appl. Phys. 1 41 2348-52
    • (2002) Japan. J. Appl. Phys. 1 , vol.41 , pp. 2348-2352
    • Takagi, S.1    Takayanagi, M.2
  • 4
    • 0041339899 scopus 로고    scopus 로고
    • Scattering of electrons in silicon inversion layers by remote surface roughness
    • Gmiz F and Roldn J B 2003 Scattering of electrons in silicon inversion layers by remote surface roughness J. Appl. Phys. 94 392-9
    • (2003) J. Appl. Phys. , vol.94 , Issue.1 , pp. 392-399
    • Gmiz, F.1    Roldn, J.B.2
  • 5
    • 32344432431 scopus 로고    scopus 로고
    • Monte Carlo study of remote Coulomb and remote surface roughness scattering in nanoscale Ge PMOSFETs with ultrathin high-k dielectrics
    • Ghosh B, Chen J, Fan X, Register L and Banerjee S 2006 Monte Carlo study of remote Coulomb and remote surface roughness scattering in nanoscale Ge PMOSFETs with ultrathin high-k dielectrics Solid-State Electron. 50 248-53
    • (2006) Solid-State Electron. , vol.50 , Issue.2 , pp. 248-253
    • Ghosh, B.1    Chen, J.2    Fan, X.3    Register, L.4    Banerjee, S.5
  • 8
    • 4243227379 scopus 로고
    • Monte Carlo study of electron transport in inversion layers
    • Fischetti M V and Laux S E 1993 Monte Carlo study of electron transport in inversion layers Phys. Rev. B 48 2244-74
    • (1993) Phys. Rev. , vol.48 , Issue.4 , pp. 2244-2274
    • Fischetti, M.V.1    Laux, S.E.2
  • 9
    • 0024178927 scopus 로고
    • On the universality of inversion-layer mobility in n- and p-channel MOSFET's
    • Takagi S, Iwase M and Toriumi A 1988 On the universality of inversion-layer mobility in n- and p-channel MOSFET's IEEE Int. Electron Device Meeting pp 398-401
    • (1988) IEEE Int. Electron Device Meeting , pp. 398-401
    • Takagi, S.1    Iwase, M.2    Toriumi, A.3
  • 10
    • 0028747841 scopus 로고
    • On the universality of inversion-layer mobility in Si MOSFET's: Part I. Effects of substrate impurity concentration
    • Takagi S, Iwase M and Toriumi A 1994 On the universality of inversion-layer mobility in Si MOSFET's: part I. Effects of substrate impurity concentration IEEE Trans. Electron Devices 41 2357-62
    • (1994) IEEE Trans. Electron Devices , vol.41 , Issue.12 , pp. 2357-2362
    • Takagi, S.1    Iwase, M.2    Toriumi, A.3
  • 11
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    • The Monte Carlo method for the solution of charge transport in semiconductors with applications to covalent materials
    • Jacoboni C and Regianni L 1983 The Monte Carlo method for the solution of charge transport in semiconductors with applications to covalent materials Rev. Mod. Phys. 55 645-705
    • (1983) Rev. Mod. Phys. , vol.55 , Issue.3 , pp. 645-705
    • Jacoboni, C.1    Regianni, L.2
  • 12
    • 0031701877 scopus 로고    scopus 로고
    • A physically-based model of the effective mobility in heavily-doped n-MOSFETs
    • Villa S, Lacaita A L, Perron L M and Bez R 1998 A physically-based model of the effective mobility in heavily-doped n-MOSFETs IEEE Trans. Electron Devices 45 110-5
    • (1998) IEEE Trans. Electron Devices , vol.45 , Issue.1 , pp. 110-115
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  • 14
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    • A comparison of models for phonon scattering in silicon inversion layers
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    • Gmiz, F.1    López-Villanueva, J.A.2
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    • A closed-loop evaluation and validation of a method for determining the dependence of the electron mobility on the longitudinal-electric field in MOSFETs
    • Roldan J, Gamiz F and Lopez-Villanueva J A 1997 A closed-loop evaluation and validation of a method for determining the dependence of the electron mobility on the longitudinal-electric field in MOSFETs IEEE Trans. Electron Devices 44 1447-53
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    • Roldan, J.1    Gamiz, F.2    Lopez-Villanueva, J.A.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.