Addressing the needs of complex MEMS design

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2002, Pages 204-209

  Clark, J V ^a   Bindel, D ^b   Kao, W ^b   Zhu, E ^b   Kuo, A ^e   Zhou, N ^c   Nie, J ^b   Demmel, J ^b   Bai, Z ^d   Govindjee, S ^a   Pister, K S J ^b   Gu, M ^b   Agogino, A ^c  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

^c UNIVERSITY OF CALIFORNIA   (United States)

^d UNIVERSITY OF CALIFORNIA   (United States)

^e UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER AIDED DESIGN; COMPUTER SIMULATION; LARGE SCALE SYSTEMS; USER INTERFACES; WORLD WIDE WEB;

REDUCED-ORDER MODELING TECHNIQUES; SOFTWARE PACKAGE SUGAR2.0; WEB-BASED INTERFACE;

MICROELECTROMECHANICAL DEVICES;

EID: 0036121898     PISSN: 10846999     EISSN: None     Source Type: Journal    
DOI: 10.1109/MEMSYS.2002.984240     Document Type: Article

References (11)

1. Advancements in a 3D multi-domain simulation package for MEMS
2. 3D MEMS simulation modeling using modified nodal analysis
3. New numerical techniques and tools in sugar for 3D MEMS simulation
4. AutoMM: Automatic generation of dynamic macromodels for MEMS devices
5. Torsional micromirros with lateral actuators
6. MEMS component extraction
7. A new approach to the analysis of the deflection of thin cantilevers
8. Evolutionary synthesis of MEMS design
9. Model reduction and control of flexible structures using Krylov vectors