Dependence of ion sheath collapse on secondary electron emission in plasma immersion ion implantation

Applied Physics Letters

Volumn 90, Issue 13, 2007, Pages

  Kwok, Dixon T K ^a   Pu, Shihao ^b,c   Fu, Ricky K Y ^b,c   Jin, Fanya ^b,c   Chu, Paul K ^b,c  

^a UNIVERSITY OF SYDNEY   (Australia)

^b CITY UNIVERSITY OF HONG KONG   (Hong Kong)

^c SOUTHWESTERN INSTITUTE OF PHYSICS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

GLASS; ION IMPLANTATION; MAGNESIUM; PLASMA THEORY; SUBSTRATES;

ELECTRON EMISSION COEFFICIENTS; ION SHEATH COLLAPSE; LANGMUIR PROBE;

ELECTRON EMISSION;

EID: 34047158175     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2717082     Document Type: Article

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