Numerical simulation of metal plasma immersion ion implantation and deposition on a dielectric wedge

IEEE Transactions on Plasma Science

Volumn 34, Issue 4 I, 2006, Pages 1059-1065

  Kwok, Dixon Tat Kun ^a  

^a UNIVERSITY OF SYDNEY   (Australia)

Author keywords

Cathodic are deposition; Dielectric substance; Particle in cell simulations; Plasma immersion ion implantation

Indexed keywords

COMPUTER SIMULATION; DEPOSITION; DIELECTRIC MATERIALS; ION IMPLANTATION; LAPLACE TRANSFORMS; MATHEMATICAL MODELS;

METAL PLASMA; PARTICLE-IN-CELL SIMULATIONS; PLASMA IMMERSION ION IMPLANTATION (PIII); SURFACE CHARGING EFFECT;

PLASMA APPLICATIONS;

EID: 33748114761     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2006.878432     Document Type: Article

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