Reliability of freestanding polysilicon microheaters to be used as igniters in solid propellant microthrusters

Sensors and Actuators, A: Physical

Volumn 135, Issue 2, 2007, Pages 329-336

  Briand, Danick ^a   Pham, Phuong Quyên ^a   de Rooij, Nicolaas F ^a  

^a UNIVERSITY OF NEUCHÂTEL   (Switzerland)

Author keywords

Microheater; Microigniter; Microthruster; Polysilicon; Solid propellant; Surface micromachining

Indexed keywords

ELECTRIC RESISTANCE; JOULE HEATING; PLASTIC DEFORMATION; POLYSILICON; SOLID PROPELLANTS; SURFACE MICROMACHINING;

MICROHEATERS; MICROIGNITERS; MICROTHRUSTERS;

ELECTRIC HEATING ELEMENTS;

EID: 34047104138     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.07.023     Document Type: Article

References (22)

1. Rossi C., Orieux S., Larangot B., Conto T.D., and Esteve D. Design, fabrication and modeling of solid propellant microrocket-application to micropropulsion. Sens. Actuators A 99 (2002) 129-133
2. Lewis Jr. D.H., Janson S.W., Cohen R.B., and Antonsson E.K. Digital micropropulsion. Sens. Actuators A 80 (2000) 143-154
3. Tanaka S., Hosokawa R., Tokudome S., Hori K., Saito H., Watanabe M., and Esashi M. MEMS-based solid propellant rocket array thruster with electrical feedthroughs. Trans. J. Jpn. Soc. Aeronaut. Space Sci. 46 151 (2003) 47-51
4. Zhang K.L., Chou S.K., and Ang S.S. Development of a solid propellant microthruster with chamber and nozzle etched on a wafer surface. J. Micromech. Microeng. 14 (2004) 785-792
5. Mueller J. Thruster options for microspacecraft-a review and evaluation of existing hardware and emerging technologies. AIAA/ASME/SAE/ASEE Joint Propulsion Conference and Exhibit. Seattle, Washington, USA, July 6-9, (1997)
6. Köhler J., Bejhed J., Kratz H., Bruhn F., Lindberg U., Hjort K., and Stenmark L. A hybrid cold gas microthruster system for spacecraft. Sens. Actuators A 97-98 (2002) 587-598
7. Mitterauer J. Micropropulsion for small spacecraft: a new challenge for FEEP (field effect electric propulsion) and MILMILS (microstructures liquid metal ion sources). NanoTech 2002-At the Edge of Revolution. Houston, Texas, USA, September 9-12 (2002)
8. London A.P., Ayón A.A., Epstein A.H., Spearing S.M., Harrison T., Peles Y., and Kerrebrock J.L. Microfabrication of a high pressure bipropellant rocket engine. Sens. Actuators A 92 (2001) 1-7
9. Platt D. A monopropellant milli-Newton thruster system for attitude control of nanosatellites. 16th Annual AIAA/USU Conference on Small Satellites. Logan, Utah, USA, August 12-15 (2002)
10. Mukerjee E.V., Wallace A.P., Yan K.Y., Howard D.W., Smith R.L., and Collins S.D. Vaporizing liquid microthruster. Sens. Actuators A 83 (2000) 231-236
11. Larangot B., Rossi C., Camps T., Berthold A., Pham P.Q., Briand D., de Rooij N.F., Puig-Vidal M., Miribel P., Montane E., Lopez E., and Samitier J. Solid propellant micro-rockets-towards a new type of power MEMS. NanoTech 2002-At the Edge of Revolution. Houston, Texas, USA, September 9-12 (2002)
12. Rossi C., Esteve D., Temple-Boyer P., and Delannoy G. Realization, characterization of micro pyrotechnic actuators and FEM modelling of the combustion ignition. Sens. Actuators A 70 (1998) 141-147
13. Grétillat M.-A., Grétillat F., and de Rooij N.F. Micromechanical relay with electrostatic actuation and metallic contacts. J. Micromech. Microeng. 9 (1999) 324-331
14. Pham P.Q., Briand D., Rossi C., and de Rooij N.F. Downscaling of solid propellant pyrotechnical microsystems. Transducers '03, The 12th International Conference on Solid State Sensors, Actuators and Microsystems. Boston, Massachusetts, USA, June 8-12 (2003)
15. Zhang X., Mehra A., Ayón A.A., and Waitz I.A. Igniters and temperature sensors for a micro-scale combustion system. Sens. Actuators A 103 (2003) 253-262
16. Kolesar E.S., Odom W.E., Jayachandran J.A., Ru M.D., Ko S.Y., Howard J.T., Allen P.B., Wilken J.M., Boydston N.C., Bosch J.E., Wilks R.J., and McAllister J.B. Design and performance of an electrothermal MEMS microengine capable of bi-directional motion. Thin Solid Films 447-448 (2004) 481-488
17. Dumitrescu M., Cobianu C., Lungu D., Dascalu D., Pascu A., Kolev S., and van den Berg A. Thermal simulation of surface micromachined polysilicon hot plates of low power consumption. Sens. Actuators A 76 (1999) 51-56
18. Ehmann M., Ruther P., von Arx M., and Paul O. Operation and short-term drift of polysilicon-heated CMOS microstructures at temperature up to 1200 K. J. Micromech. Microeng. 11 (2001) 397-401
19. Pham P.Q., Dominé D., Briand D., and de Rooij N.F. Development of microheaters on SOI for microignition applications. 15th Micromechanics Europe Workshop (MME). Leuven, Belgium, September (2004) 309-312
20. Thiery L., Briand D., Odaymat A., and de Rooij N.F. Contribution of scanning probe temperature measurements to the thermal analysis of micro-hotplates. International Workshops on Thermal Investigations of ICs and Systems, Therminic 2004. Sophia Antipolis, France, September (2004) 23-28
21. Chiao M., and Lin L. Self-buckling of micromachined beams under resistive heating. J. Microelectromech. Syst. 9 1 (2000) 146-151
22. Grudin O., Marinescu R., Landsberger L., Cheeke D., and Kahrizi M. Microstructure release and test techniques for high-temperature micro hotplate. Proceedings of the IEEE Canadian Conference on Electrical and Computer Engineering, vol. 3, no. 9. May 12 (1999) 1610-1615