Design and performance of an electrothermal MEMS microengine capable of bi-directional motion

Thin Solid Films

Volumn 447-448, Issue , 2004, Pages 481-488

  Kolesar, Edward S ^a   Odom, William E ^a   Jayachandran, Joseph A ^a   Ruff, Matthew D ^a   Ko, Simon Y ^a   Howard, Jeffery T ^a   Allen, Peter B ^a   Wilken, Josh M ^a   Boydston, Noah C ^a   Bosch, Jorge E ^a   Wilks, Richard J ^a   McAllister, Justin B ^a  

^a TEXAS CHRISTIAN UNIVERSITY   (United States)

Author keywords

Cantilever; Electrothermal microactuator; Microelectromechanical system (MEMS); Microengine

Indexed keywords

COMPUTER AIDED DESIGN; COMPUTER SOFTWARE; ELECTRIC RESISTANCE; ELECTROSTATICS; MICROACTUATORS; MICROMACHINING; MICROSENSORS; PIEZOELECTRIC MATERIALS; POLYSILICON; PRODUCT DESIGN; THERMAL EXPANSION;

CANTILEVERS; ELECTROTHERMAL MICROACTUATORS; MICROENGINES;

MICROELECTROMECHANICAL DEVICES;

EID: 10744221315     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2003.07.011     Document Type: Conference Paper

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