Downscaling of solid propellant pyrotechnical microsystems

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 2, Issue , 2003, Pages 1423-1426

  Pham, P Q ^a   Briand, D ^a   Rossi, C ^b   De Rooij, N F ^a  

^a UNIVERSITY OF NEUCHÂTEL   (Switzerland)

^b LAAS CNRS   (France)

Author keywords

Combustion; Etching; Ignition; Propulsion; Seals; Silicon; Solid state circuits; Space technology; Temperature; Thermal conductivity

Indexed keywords

ACTUATORS; COMBUSTION; ETCHING; IGNITION; MICROSYSTEMS; PROPELLANTS; PROPULSION; REACTIVE ION ETCHING; SEALS; SILICON; SOLID PROPELLANTS; TEMPERATURE; THERMAL CONDUCTIVITY; TRANSDUCERS;

DEEP REACTIVE ION ETCHING; ELECTRICAL POWER; ENERGETIC SOLIDS; MICRO-MACHINED; MINIMUM TEMPERATURES; SOLID-STATE CIRCUITS; SPACE TECHNOLOGIES; THERMAL-INSULATING;

SOLID-STATE SENSORS;

EID: 84944735115     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1217042     Document Type: Conference Paper

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