Metal-insulator-metal capacitors using Ba2Ti9O20 dielectric thin film

Journal of the European Ceramic Society

Volumn 27, Issue 8-9 SPEC. ISS., 2007, Pages 2871-2874

  Lim, Jong Bong ^a   Jeong, Young Hun ^a   Nahm, Sahn ^a   Paik, Jong Hoo ^b   Sun, Ho Jung ^c   Lee, Hwack Joo ^d  

^a Korea University   (South Korea)

^b Korea Institute of Ceramic Engineering and Technology (KICET)   (South Korea)

^c Kunsan National University   (South Korea)

^d Korea Research Institute of Standards and Science   (South Korea)

Author keywords

Ba2Ti9O20 thin film; Capacitors; Dielectric properties; Electrical properties

Indexed keywords

BARIUM COMPOUNDS; CAPACITANCE; CAPACITORS; DIELECTRIC PROPERTIES; LEAKAGE CURRENTS; RAPID THERMAL ANNEALING; THIN FILMS;

CAPACITANCE DENSITY; DISSIPATION FACTOR; METAL-INSULATOR-METAL CAPACITORS; TEMPERATURE COEFFICENT OD CAPACITANCE;

MIM DEVICES;

BARIUM COMPOUNDS; CAPACITANCE; CAPACITORS; DIELECTRIC PROPERTIES; LEAKAGE CURRENTS; MIM DEVICES; RAPID THERMAL ANNEALING; THIN FILMS;

EID: 33947697930     PISSN: 09552219     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jeurceramsoc.2006.11.042     Document Type: Article

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