Structural variation of the BaTi4O9 thin films grown by RF magnetron sputtering

Journal of the American Ceramic Society

Volumn 88, Issue 5, 2005, Pages 1209-1212

  Jang, Bo Yun ^a   Jeong, Young Hun ^a   Lee, Suk Jin ^a   Lee, Kyong Jae ^a   Nahm, Sahn ^a   Sun, Ho Jung ^b   Lee, Hwack Joo ^c  

^a Korea University   (South Korea)

^b Kunsan National University   (South Korea)

^c Korea Research Institute of Standards and Science   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; BARIUM COMPOUNDS; FILM GROWTH; MAGNETRON SPUTTERING; PLATINUM; RAPID THERMAL ANNEALING; SILICA; THIN FILMS;

AMORPHOUS PHASES; RF MAGNETRON SPUTTERING; STRUCTURAL VARIATIONS;

CERAMIC MATERIALS;

EID: 27644468990     PISSN: 00027820     EISSN: None     Source Type: Journal    
DOI: 10.1111/j.1551-2916.2005.00311.x     Document Type: Article

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