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Volumn 934, Issue , 2006, Pages 20-25
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Visible-blind UV/IR photodetectors integrated on Si substrates
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Author keywords
[No Author keywords available]
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Indexed keywords
CAPACITANCE;
ELLIPSOMETRY;
NITRIDES;
SEMICONDUCTOR MATERIALS;
SILICON;
SILICON WAFERS;
SPECTROSCOPIC ANALYSIS;
MECHANICAL STRESS;
MULTI SPECTRAL PHOTORESPONSE;
SEMICONDUCTING LAYERS;
PHOTODETECTORS;
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EID: 33947625223
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1557/proc-0934-i09-04 Document Type: Conference Paper |
Times cited : (3)
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References (10)
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