A scanning tunneling microscopy study of PH3 adsorption on Si(1 1 1)-7 × 7 surfaces, P-segregation and thermal desorption

Surface Science

Volumn 601, Issue 7, 2007, Pages 1768-1774

  Ji, Jeong Young ^a   Shen, T C ^a  

^a UTAH STATE UNIVERSITY   (United States)

Author keywords

Adsorption; Desorption; Phosphine; Phosphorous; Scanning tunneling microscopy; Silicon; Surface segregation

Indexed keywords

ADATOMS; ADSORPTION; DANGLING BONDS; DESORPTION; RAPID THERMAL ANNEALING; SCANNING TUNNELING MICROSCOPY; SILICON; SURFACE SEGREGATION;

ADATOM SITES; CORNER ADATOMS; PHOSPHINE;

PHOSPHORUS COMPOUNDS;

EID: 33947591465     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.susc.2007.02.007     Document Type: Article

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