Thermal reactions of phosphine with Si(100): A combined photoemission and scanning-tunneling-microscopy study

Surface Science

Volumn 424, Issue 1, 1999, Pages 7-18

  Lin, D S ^a   Ku, T S ^a   Sheu, T J ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ADSORPTION; ANNEALING; CHEMICAL VAPOR DEPOSITION; DESORPTION; DISSOCIATION; ELECTRON ENERGY LEVELS; EMISSION SPECTROSCOPY; MORPHOLOGY; PHOTOEMISSION; PYROLYSIS; SCANNING TUNNELING MICROSCOPY; SILICON;

PHOSPHINE;

PHOSPHORUS COMPOUNDS;

EID: 0345103258     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0039-6028(98)00943-1     Document Type: Article

References (20)

1. Pearce C.W. VLSI Technology. 1983;McGraw-Hill, New York. Chap. 2.
2. Yu M.L., Meyerson B.S. J. Vac. Sci. Technol. A. 2:1984;446.
3. Yu M.L., Vitkavage J.J., Meyerson B.S. J. Appl. Phys. 59:1986;4032.
4. Wang Y., Bronikowski M.J., Hamers R.J. J. Phys. Chem. 98:1994;5966.
5. Wang Y., Chen X., Hamers R.J. Phys. Rev. B. 50:1994;4534.
6. Colaianni M.L., Chen P.J., Yates J.T. J. Vac. Sci. Technol. A. 12:1994;2995.
7. Shan J., Wang Y., Hamers R.J. J. Phys. Chem. 100:1996;4961.
8. Kipp L., Brigans R.D., Biegelsen D.K., Northrup J.E., Garcia A., Swartz L.E. Phys. Rev. B. 52:1995;5843.
9. Jacobson M.L., Chiu M.C., Crowell J.E. Langmuir. 14:1998;1428.
10. Wang J., Arias T.A., Joannopoulos J.D. Phys. Rev. B. 47:1993;10497.
11. Lin D.-S., Huang K.-H., Pi T.-W., Wu R.-T. Phys. Rev. B. 54:1996;16958.
12. Lin D.-S., Miller T., Chiang T.-C. Phys. Rev. Lett. 67:1991;2187.
13. Pattey L., Bullock E.L., Abukawa T., Kono S., Johansson L.S.O. Phys. Rev. Lett. 75:1995;2538.
14. Himpsel F.J., McFeely F.R., Morar J.F., Taleb-Ibrahimi A., Yarmoff J.A. Photoemission and Adsorption Spectroscopy of Solids and Interfaces with Synchrotron Radiation. Scoles G. Proceedings of the International School of Physics "Enrico Fermi" 1991;North-Holland, New York. Course CVIII.
15. Chiang T.-C. CRC Crit. Rev. Solid State Mater. Sci. 14:1988;269.
16. Lin D.-S., Miller T., Chiang T.-C., Tsu R., Greene J.E. Phys. Rev. B. 48:1993;11846.
17. Lin D.-S., Miller T., Chiang T.-C. Phys. Rev. B. 47:1993;6543.
18. Cao P.L., Lee L.Q., Dai J.J., Chou R.H. J. Phys.: Condens. Matter. 6:1994;6103.
19. Lubben D., Tsu R., Bramblett T.R., Greene J.E. J. Vac. Sci. Technol. A. 9:1991;3003.
20. Boland J.J. Phys. Rev. Lett. 67:1991;1539.