Low-temperature silicon epitaxy on hydrogen-terminated Si(001) surfaces

Physical Review B - Condensed Matter and Materials Physics

Volumn 70, Issue 11, 2004, Pages

  Ji, Jeong Young ^a   Shen, T C ^a  

^a UTAH STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

HYDROGEN; SILICON;

ARTICLE; CHEMICAL STRUCTURE; DESORPTION; DIFFUSION; HIGH TEMPERATURE; LOW TEMPERATURE; SCANNING TUNNELING MICROSCOPY; STRUCTURE ANALYSIS; SURFACE PROPERTY; TEMPERATURE DEPENDENCE; THICKNESS;

EID: 19744382173     PISSN: 01631829     EISSN: None     Source Type: Journal    
DOI: 10.1103/PhysRevB.70.115309     Document Type: Article

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