Substrate temperature measurement using a commercial band-edge detection system

Journal of Crystal Growth

Volumn 301-302, Issue SPEC. ISS., 2007, Pages 88-92

  Farrer, I ^a   Harris, J J ^b   Thomson, R ^b   Barlett, D ^c   Taylor, C A ^c   Ritchie, D A ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

^b RTA Instruments   (United Kingdom)

^c k Space Associates Inc   (United States)

Author keywords

A1. Substrate; A3. Molecular beam epitaxy

Indexed keywords

MOLECULAR BEAM EPITAXY; PYROMETERS; SEMICONDUCTING GALLIUM ARSENIDE; SUBSTRATES; WSI CIRCUITS;

BAND-EDGE DETECTION SYSTEM; FREE CARRIER ABSORPTION;

TEMPERATURE MEASUREMENT;

EID: 33947323710     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2006.11.273     Document Type: Article

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