Formation of stacked Ni silicide nanocrystals for nonvolatile memory application

Applied Physics Letters

Volumn 90, Issue 11, 2007, Pages

  Chen, Wei Ren ^a   Chang, Ting Chang ^b   Liu, Po Tsun ^a   Lin, Po Sun ^b   Tu, Chun Hao ^a   Chang, Chun Yen ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

^b NATIONAL SUN YAT SEN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; NICKEL; NONVOLATILE STORAGE; SILICA; SILICIDES; THRESHOLD VOLTAGE;

COMIXED TARGETS; DATA RETENTION; LOW VOLTAGE PROGRAMMING;

NANOCRYSTALS;

EID: 33947319154     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2713177     Document Type: Article

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