Direct growth of nickel disilicide nanocrystals in silicon dioxide films

Journal of Applied Physics

Volumn 99, Issue 11, 2006, Pages

  Yoon, Jong Hwan ^a   Lee, Gyu Hyun ^a   Elliman, Robert G ^b  

^a Kangwon National University   (South Korea)

^b AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; APPROXIMATION THEORY; CRYSTAL STRUCTURE; EMBEDDED SYSTEMS; OXIDES; SEMICONDUCTING SILICON COMPOUNDS;

NICKEL DISILICIDE (NI S2); SILICON-RICH OXIDE (SI OX) FILMS;

NANOSTRUCTURED MATERIALS;

EID: 33745230041     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2202740     Document Type: Article

References (18)

1. T. A. Fulton and G. D. Dolan, Phys. Rev. Lett. 59, 109 (1987).
2. L. Zhuang, L. Guo, and S. Y. Chou, Appl. Phys. Lett. 72, 1205 (1998).
3. D. L. Klein, R. Roth, A. K. L. Lim, A. P. Alivisators, and P. L. McEuen, Nature (London) 389, 699 (1997).
4. S. J. Tans, A. R. M. Verschueren, and C. Dekker, Nature (London) 393, 49 (1998).
5. H. Park, J. Park, A. K. L. Lim, E. H. Anderson, A. P. Alivisators, and P. L. McEuen, Nature (London) 407, 57 (2000).
6. M. H. Devoret, D. Esteve, and C. Urbina, Nature (London) 360, 547 (1992).
7. D. V. Averin and K. K. Likharev, J. Low Temp. Phys. 62, 345 (1986).
8. M. G. Spooner, T. M. Walsh, and R. G. Elliman, Mater. Res. Soc. Symp. Proc. 770, 11.8.1 (2003).
9. T. Inokuma, Y. Wakayama, T. Muramoto, R. Aoki, Y. Kurata, and S. Hasegawa, J. Appl. Phys. 83, 2228 (1998).
10. D. Nesheva, C. Raptis, and A. Perakis, J. Appl. Phys. 92, 4678 (2002).
11. C. Hayzlden, J. L. Batstone, and R. C. Cammarata, Appl. Phys. Lett. 60, 225 (1992).
12. H. Yang, R. F. Pinizzotto, L. Luo, and F. Namavar, Appl. Phys. Lett. 62, 2694 (1993).
13. X. W. Zhang, S. P. Wong, and W. Y. Cheung, J. Appl. Phys. 92, 3778 (2002).
14. W. W. Wu, J. H. He, S. L. Cheng, S. W. Lee, and L. J. Chen, Appl. Phys. Lett. 83, 1836 (2003).
15. C. A. Decker, R. Solanki, J. L. Freeouf, and J. R. Carruthers, Appl. Phys. Lett. 84, 1389 (2004).
16. Smithells Metals Reference Book, edited by, E. A. Brandes, and, G. B. Brook, (Butterworth-Heinemann, Oxford, 1992).
17. K. N. Tu, Appl. Phys. Lett. 27, 221 (1975).
18. R. C. Cammarata, C. V. Thompson, C. Hayzelden, and K. N. Tu, J. Mater. Res. 5, 2133 (1990).