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Volumn 90, Issue 11, 2007, Pages
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Excimer laser annealing of silicon nanowires
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Author keywords
[No Author keywords available]
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Indexed keywords
HIGH TEMPERATURE PROCESSING;
LASER ANNEALING;
SILICON NANOWIRES;
THERMAL ANNEALING;
ANNEALING;
DISPLAY DEVICES;
HIGH TEMPERATURE EFFECTS;
NANOWIRES;
PLASTICS;
SENSOR ARRAYS;
SILICON;
EXCIMER LASERS;
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EID: 33947316110
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/1.2713774 Document Type: Article |
Times cited : (26)
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References (15)
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