Identification of nanoindentation-induced phase changes in silicon by in situ electrical characterization

Journal of Applied Physics

Volumn 101, Issue 8, 2007, Pages

  Ruffell, S ^a   Bradby, J E ^a   Fujisawa, N ^a   Williams, J S ^a  

^a AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLINE MATERIALS; ELECTRIC CURRENTS; ELECTRIC FIELD EFFECTS; NANOINDENTATION; PHASE COMPOSITION; SENSITIVITY ANALYSIS; SILICON; TRANSMISSION ELECTRON MICROSCOPY;

CURRENT-VOLTAGE CURVES; IN SITU ELECTRICAL CHARACTERIZATION; IN SITU ELECTRICAL MEASUREMENTS;

PHASE TRANSITIONS;

EID: 33947239983     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2724803     Document Type: Conference Paper

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