Comparison of MEMS variable optical attenuator designs

2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest

Volumn , Issue , 2002, Pages 189-190

  Marxer, C ^a   De Jong, B ^a   De Rooif, N ^b  

^a Sercalo Microtechnology Ltd   (Switzerland)

^b UNIVERSITY OF NEUCHÂTEL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

DESIGN; ELECTROMAGNETIC WAVE ATTENUATION; MEMS; MOEMS;

FIRST DESIGNS; MICRO ELECTROMECHANICAL SYSTEM (MEMS); OUTPUT FIBERS; POLARIZATION DEPENDENT LOSS; VARIABLE OPTICAL ATTENUATORS; WAVELENGTH-DEPENDENT LOSS;

MACHINE DESIGN;

EID: 84963784802     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/OMEMS.2002.1031505     Document Type: Conference Paper

References (3)

1. C. Marxer, P. Griss, N.F. de Rooij, A variable optical attenuator based on silicon micromechanics, IEEE Photonics Technology Letters, vol. 11, no. 2, pp. 233-235, 1999
2. Patent wo01/57578, "Mehrfachschalter"
3. Patent us5,508,840 "light modulator"