Microelectromechanical digital-to-analog converters of displacement for step motion actuators

Journal of Microelectromechanical Systems

Volumn 9, Issue 2, 2000, Pages 218-225

  Toshiyoshi, Hiroshi ^a,b,c   Kobayashi, Dai ^c   Mita, Makoto ^b   Hashiguchi, Gen ^d   Fujita, Hiroyuki ^b   Endo, Junji ^e   Wada, Yasuo ^e  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

^c TOKYO DENKI UNIVERSITY   (Japan)

^d KAGAWA UNIVERSITY   (Japan)

^e HITACHI LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DIGITAL TO ANALOG CONVERSION; FINITE ELEMENT METHOD; MICROACTUATORS; RESISTORS; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING SILICON;

DISPLACEMENT CONTROL; MICROELECTROMECHANICAL DIGITAL TO ANALOG CONVERTER;

MICROELECTROMECHANICAL DEVICES;

EID: 0033702870     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.846702     Document Type: Article

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