Growth of crystallized Ge films from VHF inductively-coupled plasma of H2-diluted GeH4

Thin Solid Films

Volumn 515, Issue 12, 2007, Pages 4971-4974

  Sakata, T ^a   Makihara, K ^a   Murakami, H ^a   Higashi, S ^a   Miyazaki, S ^a  

^a HIROSHIMA UNIVERSITY   (Japan)

Author keywords

Crystallinity; Germanium; High rate deposition; VHF ICP

Indexed keywords

CRYSTALLINE MATERIALS; GERMANIUM COMPOUNDS; INDUCTIVELY COUPLED PLASMA; NUCLEATION; QUARTZ; SUBSTRATES;

CRYSTALLINE NUCLEATION; HIGH RATE DEPOSITION; QUARTZ SUBSTRATES; SINGLE TURN ANTENNAS;

FILM GROWTH;

EID: 33947163283     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2006.10.048     Document Type: Article

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