메뉴 건너뛰기




Volumn 2005, Issue , 2005, Pages 128-133

A silicon micromachined gyroscope driven by the rotating carrier's angle velocity

Author keywords

Angular velocity; Gyroscope; Micromachine; Rotating carrier

Indexed keywords

ANGULAR VELOCITY; COMPUTER SIMULATION; MATHEMATICAL MODELS; MICROMACHINING; PARAMETER ESTIMATION; SILICON;

EID: 33947099917     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (9)

References (8)
  • 1
    • 0028427666 scopus 로고
    • A study of silicon angular rate sensors using anisotropic etching technology
    • K.Maenaka, T.Shiozawa, "A study of silicon angular rate sensors using anisotropic etching technology, "Sensors and Actuators, 1994,43:72-77
    • (1994) Sensors and Actuators , vol.43 , pp. 72-77
    • Maenaka, K.1    Shiozawa, T.2
  • 2
    • 0029543070 scopus 로고    scopus 로고
    • Jun Mizuno, Kay Nottmeyer, cleopata cabuz, Takashi Kobayashi, Masayoshi Esashi, Fabrication and Characterization of a silicon capacitive structure for simultaneous Detection of Acceration and Angular Rate, The 8th international confence on solid-State Sensors and Actuators, and Eurosensors Stockholm. Sweden June 25-29,1995,Transducers 95,Eurosensors,pp 679-682
    • Jun Mizuno, Kay Nottmeyer, cleopata cabuz, Takashi Kobayashi, Masayoshi Esashi, "Fabrication and Characterization of a silicon capacitive structure for simultaneous Detection of Acceration and Angular Rate, "The 8th international confence on solid-State Sensors and Actuators, and Eurosensors Stockholm. Sweden June 25-29,1995,Transducers 95,Eurosensors,pp 679-682
  • 3
    • 0000616811 scopus 로고    scopus 로고
    • Analysis of a highly sensitive silicon gyroscope with cantilever beam as vibrating mass
    • K.Maenaka, T.Fujita, Y.Konishi, M.Maeda, "Analysis of a highly sensitive silicon gyroscope with cantilever beam as vibrating mass," Sensors and Actuatous,1996,54:568-513
    • (1996) Sensors and Actuatous , vol.54 , pp. 568-513
    • Maenaka, K.1    Fujita, T.2    Konishi, Y.3    Maeda, M.4
  • 4
    • 0032166278 scopus 로고    scopus 로고
    • Ofir Degani, Dan J. seter, Eran Socher, Shmuel Kaldor, and Yael Nemirorsky, Optimal Design and Noise Consideration of Micromachined Vibrating Rate Gyroscope with Modulated Integrative Differential Optical Sensing, Journal of Microelectromechanical systems, 7, no.3, September 1998: 329-338
    • Ofir Degani, Dan J. seter, Eran Socher, Shmuel Kaldor, and Yael Nemirorsky, "Optimal Design and Noise Consideration of Micromachined Vibrating Rate Gyroscope with Modulated Integrative Differential Optical Sensing, " Journal of Microelectromechanical systems, Vol.7, no.3, September 1998: 329-338
  • 5
    • 33947100826 scopus 로고    scopus 로고
    • JOrg R.Kaienburg, Ralf Schellin, A novel silicon surface micromachining angle Sensor, Sensors and Actuators, 1999,71:542-556
    • JOrg R.Kaienburg, Ralf Schellin, "A novel silicon surface micromachining angle Sensor, " Sensors and Actuators, 1999,71:542-556
  • 6
    • 0033741542 scopus 로고    scopus 로고
    • Vibrating gyroscope consisting of three layers of polysilicon thin film
    • Toshiyuki Tsuchiya, Yasuyuki Kageyama, Hirofumi Funadashi, Jiro Sakata, "Vibrating gyroscope consisting of three layers of polysilicon thin film, " Sensors and Actuators, 2000,82:114-119
    • (2000) Sensors and Actuators , vol.82 , pp. 114-119
    • Tsuchiya, T.1    Kageyama, Y.2    Funadashi, H.3    Sakata, J.4
  • 7
    • 0033888240 scopus 로고    scopus 로고
    • A micromachined vibrating rate gyroscope with independent beams for the drive and detection modes
    • Yoichi Mochida, Masaya Tamura, Kuniki Ohwada, "A micromachined vibrating rate gyroscope with independent beams for the drive and detection modes," Sensors and Actuators, 2000,80:170-178
    • (2000) Sensors and Actuators , vol.80 , pp. 170-178
    • Mochida, Y.1    Tamura, M.2    Ohwada, K.3
  • 8
    • 0033741711 scopus 로고    scopus 로고
    • A bulk micromachined vibratory lateral gyroscope fabricated with wafer bonding and deep trench etching
    • Zhihong Li, Zhenchuan Yang, Zhixiong Xiao, Yilong Hao, TingLi, Guoying Wu, Yangyuan Wang, "A bulk micromachined vibratory lateral gyroscope fabricated with wafer bonding and deep trench etching, " Sensors and Actuators, 2000,83:24-29
    • (2000) Sensors and Actuators , vol.83 , pp. 24-29
    • Li, Z.1    Yang, Z.2    Xiao, Z.3    Hao, Y.4    TingLi, G.W.5    Wang, Y.6


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.